Closed form Models for Pull-In Voltage of Electrostatically Actuated Cantilever Beams and Comparative Analysis of Cantilevers and Microgripper
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چکیده
منابع مشابه
Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams
A gap with variable geometry is presented for both cantilever beam and fixed-fixed beam actuators as a method to reduce the pull-in voltage while maintaining a required displacement. The method is applicable to beams oriented either in a plane parallel to or perpendicular to a substrate, but is most suitable for vertically oriented (lateral) beams fabricated with a high aspect ratio process whe...
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We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics of microstructural beams fabricated with silicon surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensio...
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ژورنال
عنوان ژورنال: Journal of Electrical Engineering
سال: 2012
ISSN: 1335-3632
DOI: 10.2478/v10187-012-0034-6